@inproceedings{ZehetnerVankoIzsaketal.2022,
  author    = {Johann Zehetner and Gabriel Vanko and Tibor Izsak and Eva Kov{\´a}čov{\´a} and Milan Drzik and Fadi Dohnal and Alexander Kromka},
  title     = {Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques},
  series = {2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM): Smolenice, Slovakia, 23-26 October 2022},
  publisher = {IEEE},
  address   = {Piscataway, NJ},
  isbn      = {978-1-6654-6977-7},
  issn      = {2474-9737},
  doi       = {10.1109/ASDAM55965.2022.9966776},
  pages     = {195 -- 198},
  year      = {2022},
  abstract  = {The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.},
  language  = {en}
}