TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Zehetner, Johann
A1  - Vanko, Gabriel
A1  - Dohnal, Fadi
A1  - Izsák, Tibor
A1  - Drzik, Milan
A1  - Kromka, Alexander
T1  - Recent challenges in micromachining of wide-bandgap materials and fabrication of mems for harsh environments
T2  - Proceeding of the International Conference on Advances in Electronic and Photonic Technologies (ADEPT 2022): Tatranská Lomnica, Slovakia, June 20th-24th, 2022.
N2  - The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
KW  - harsh environment
KW  - MEMS
KW  - HEMT
KW  - laser ablation
KW  - diamond
Y1  - 2022
SN  - 978-80-554-1884-1
SB  - 978-80-554-1884-1
SP  - 7
EP  - 12
S1  - 6
PB  - EDIS-Publishing Centre of UZ
CY  - Žilina
ER  -