TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Zehetner, Johann
A1  - Vanko, Gabriel
A1  - Izsak, Tibor
A1  - Kováčová, Eva
A1  - Drzik, Milan
A1  - Dohnal, Fadi
A1  - Kromka, Alexander
T1  - Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
T2  - 2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM): Smolenice, Slovakia, 23-26 October 2022
N2  - The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
KW  - Micromechanical devices
KW  - Semiconductor device measurement
KW  - Wet etching
KW  - Semiconductor lasers
KW  - Measurement by laser beam
Y1  - 2022
SN  - 2474-9737
SS  - 2474-9737
SN  - 978-1-6654-6977-7
SB  - 978-1-6654-6977-7
SN  - 978-1-6654-6979-1
SB  - 978-1-6654-6979-1
U6  - https://doi.org/10.1109/ASDAM55965.2022.9966776
DO  - https://doi.org/10.1109/ASDAM55965.2022.9966776
SP  - 195
EP  - 198
S1  - 4
PB  - IEEE
CY  - Piscataway, NJ
ER  -