TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Domke, Matthias A1 - Matylitsky, Victor A1 - Stroj, Sandra T1 - Surface ablation efficiency and quality of fs lasers in single-pulse mode, fs lasers in burst mode, and ns lasers JF - Applied Surface Science KW - Laser ablation KW - Ablation efficiency KW - Burst mode KW - Silicon KW - Copper KW - Steel Y1 - 2019 U6 - https://doi.org/10.1016/j.apsusc.2019.144594 DO - https://doi.org/10.1016/j.apsusc.2019.144594 N1 - In Press, Corrected Proof, Available online 5 November 2019 SP - 6 S1 - 6 ER -