TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Zoppel, Sandra
A1  - Gray, David
A1  - Farsari, Maria
A1  - Merz, Robert
A1  - Reider, Georg A.
A1  - Fotakis, Costas
T1  - UV-femtosecond laser ablation of SrTiO3 single crystals
JF  - Journal of Physics: Conference Series
N2  - We have investigated the ablation behaviour of single crystal SrTiO3 <100> with focus on the influence of the pulse duration at a wavelength of 248 nm. The experiments were performed with KrF-excimer lasers with pulse durations of 34 ns and 500 fs, respectively. Femtosecond-ablation turns out to be more efficient by one order of magnitude and to eliminate the known problem of cracking of SrTiO3 during laser machining with longer pulses. In addition, the cavities ablated with femtosecond pulses display a smoother surface with no indication of melting and well-defined, sharp edges. These effects can be explained by the reduced thermal shock effect on the material by using ultrashort pulses.
Y1  - 2007
U6  - https://doi.org/10.1088/1742-6596/59/1/130
DO  - https://doi.org/10.1088/1742-6596/59/1/130
VL  - o.Jg.
IS  - Bd. 59: Eighth International Conference on Laser Ablation. Banff, Canada. 11–16 September 2005
SP  - 610
EP  - 615
ER  -