TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Moser, Regina A1 - Domke, Matthias A1 - Winter, Jan A1 - Huber, Heinz A1 - Marowsky, Gerd T1 - Single pulse femtosecond laser ablation of silicon – a comparison between experimental and simulated two-dimensional ablation profiles JF - Advanced Optical Technologies KW - femtosecond laser ablation KW - silicon laser ablation KW - two-dimensional morphology KW - two-temperature model Y1 - 2018 SN - 2192-8576 SS - 2192-8576 U6 - https://doi.org/10.1515/aot-2018-0013 DO - https://doi.org/10.1515/aot-2018-0013 VL - 7. Jg IS - H. 4 SP - 255 EP - 264 ER -