TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Farsari, Maria A1 - Filippidis, George A1 - Zoppel, Sandra A1 - Reider, Georg A. A1 - Fotakis, Costas T1 - Micromachining of silicon carbide using femtosecond lasers JF - Journal of Physics: Conference Series N2 - We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude. Y1 - 2007 U6 - https://doi.org/10.1088/1742-6596/59/1/018 DO - https://doi.org/10.1088/1742-6596/59/1/018 VL - o.Jg. IS - Bd. 59: Eighth International Conference on Laser Ablation. Banff, Canada. 11–16 September 2005 SP - 84 EP - 87 ER -