@article{PartelUrbanMotzek2013,
  author    = {Stefan Partel and Gerald A. Urban and Kristian Motzek},
  title     = {Simulation model validation of two common i-line photoresists},
  series   = {Microelectronic Engineering},
  volume    = {o.Jg.},
  number    = {Bd. 110},
  issn      = {0167-9317},
  doi       = {10.1016/j.mee.2013.01.054},
  pages     = {75 -- 79},
  year      = {2013},
  language  = {en}
}