@article{PartelMayerHudeketal.2011,
  author    = {Stefan Partel and Markus Mayer and Peter Hudek and Can Dincer and Jochen Kieninger and Gerhard A. Urban and Kristian Motzek and Ladislav Matay},
  title     = {Fabrication process development for a high sensitive electrochemical IDA sensor},
  series   = {Microelectronic Engineering},
  volume    = {o.Jg.},
  number    = {Bd. 97},
  issn      = {0167-9317},
  doi       = {10.1016/j.mee.2012.03.028},
  pages     = {235 -- 240},
  year      = {2011},
  language  = {en}
}