@article{ZoppelFarsariMerzetal.2006, author = {Sandra Zoppel and Maria Farsari and Robert Merz and Johann Zehetner and G{\"u}nther Stangl and Georg A. Reider and Costas Fotakis}, title = {Laser micro machining of 3C-SiC single crystals}, series = {Microelectronic Engineering}, volume = {83. Jg.}, number = {H. 4-9: Micro- and Nano-Engineering MNE 2005. Vienna, Austria. 19-22 September 2005}, doi = {10.1016/j.mee.2006.01.064}, pages = {1400 -- 1402}, year = {2006}, language = {en} }