TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Partel, Stefan
A1  - Mayer, Markus
A1  - Motzek, Kristian
T1  - In-situ measurement and characterization of photoresists during development
JF  - SPIE Newsroom
Y1  - 2012
SP  - 3
S1  - 3
ER  -