@inproceedings{DomkeEglePireddaetal.2015,
  author    = {Matthias Domke and Bernadette Egle and Giovanni Piredda and Gernot Fasching and Marius Bodea and Elisabeth Schwarz},
  title     = {Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses},
  series = {Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX. 9–12 February 2015. San Francisco, California, United States},
  volume    = {9350},
  editor    = {Stephan Roth and Yoshiki Nakata and Beat Neuenschwander and Xianfan Xu},
  publisher = {SPIE},
  address   = {Bellingham, Wash.},
  year      = {2015},
  language  = {en}
}