TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Domke, Matthias
A1  - Egle, Bernadette
A1  - Piredda, Giovanni
A1  - Fasching, Gernot
A1  - Bodea, Marius
A1  - Schwarz, Elisabeth
ED  - Roth, Stephan
ED  - Nakata, Yoshiki
ED  - Neuenschwander, Beat
ED  - Xu, Xianfan
T1  - Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses
T2  - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX. 9–12 February 2015. San Francisco, California, United States
Y1  - 2015
VL  - 9350
SP  - 6
S1  - 6
PB  - SPIE
CY  - Bellingham, Wash.
ER  -