@inproceedings{ZehetnerVankoCholevaetal.2014, author = {Johann Zehetner and Gabriel Vanko and Pavlina Choleva and Jaroslav Dzuba and Ivan Ryger and Tibor Lalinsky}, title = {Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions}, series = {ASDAM 2014. Conference proceedings. The tenth International Conference on Advanced Semiconductor Devices and Microsystems. Smolenice Castle, Slovakia. 20-22 October 2014}, editor = {Juraj Breza and Daniel Donoval and Erik Vavrinsky}, publisher = {IEEE}, address = {Piscataway, NJ}, year = {2014}, language = {en} }