TY - CHAP U1 - Konferenzveröffentlichung A1 - Domke, Matthias A1 - Felsl, Dominik A1 - Rapp, Stephan A1 - Sotrop, Jürgen A1 - Huber, Heinz P. A1 - Schmidt, Michael T1 - The role of shockwaves in confined laser ablation T2 - Proceedings of LPM 2014 - the 15 th International Symposium on Laser Precision Microfabrication Y1 - 2014 SP - 5 S1 - 5 PB - Japan Laser Processing Society CY - Ibaraki ER -