@inproceedings{ZehetnerVankoDzubaetal.2016, author = {Johann Zehetner and Gabriel Vanko and Jaroslav Dzuba and Tibor Lalinsky and Michal Lucki and Stanislav Kraus}, title = {Micro structuring of membranes for sensor devices on different nulk materials by femtosecond laser ablation}, series = {Proceedings of ADEPT. 4th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 20 - 23, 2016}, editor = {Jaroslav Kovac and Miroslav Michalka and Sona Kovacova and Daniel Jandura}, publisher = {University of Zilina}, address = {Zilina}, pages = {55 -- 58}, year = {2016}, language = {en} }