TY - CHAP U1 - Konferenzveröffentlichung A1 - Zehetner, Johann A1 - Vanko, Gabriel A1 - Dzuba, Jaroslav A1 - Lalinsky, Tibor A1 - Lucki, Michal A1 - Kraus, Stanislav ED - Kovac, Jaroslav ED - Michalka, Miroslav ED - Kovacova, Sona ED - Jandura, Daniel T1 - Micro structuring of membranes for sensor devices on different nulk materials by femtosecond laser ablation T2 - Proceedings of ADEPT. 4th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 20 - 23, 2016 Y1 - 2016 SP - 55 EP - 58 PB - University of Zilina CY - Zilina ER -