@inproceedings{ChovanUherekFiguraetal.2018, author = {Jozef Chovan and Frantisek Uherek and Daniel Figura and Dana Seyringer and Lenka Gajdosova}, title = {Design and simulation of Si/SiO2/SiN waveguides structure}, series = {Proceedings of ADEPT. 6th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 18 - 21, 2018}, editor = {Juraj Nevrela and Michal Micjan and Miroslav Novota and Jaroslav Kovac}, publisher = {Institute of Electriconics and Photonics, FEI STU}, address = {Bratislava}, pages = {160 -- 163}, year = {2018}, language = {en} }