@article{ZehetnerKromkaIzsaketal.2020,
  author    = {Johann Zehetner and Alexander Kromka and Tibor Izsak and Gabriel Vanko and Lenka Gajdosova and Stephan Kasemann},
  title     = {Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications},
  series   = {Proceedings},
  volume    = {o.Jg.},
  number    = {Bd. 56: 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems},
  issn      = {2504-3900},
  doi       = {10.3390/proceedings2020056013},
  year      = {2020},
  language  = {en}
}