TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Zehetner, Johann
A1  - Kromka, Alexander
A1  - Izsak, Tibor
A1  - Vanko, Gabriel
A1  - Gajdosova, Lenka
A1  - Kasemann, Stephan
T1  - Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications
JF  - Proceedings
Y1  - 2020
SN  - 2504-3900
SS  - 2504-3900
U6  - https://doi.org/10.3390/proceedings2020056013
DO  - https://doi.org/10.3390/proceedings2020056013
VL  - o.Jg.
IS  - Bd. 56: 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems
SP  - 3
S1  - 3
ER  -