@article{HermannDezhdarHarderetal.2010, author = {Sonja Hermann and Tara Dezhdar and Nils-Peter Harder and Rolf Brendel and Michael Seibt and Sandra Stroj}, title = {Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers}, series = {Journal of Applied Physics}, volume = {108. Jg.}, number = {H. 11}, issn = {0021-8979}, doi = {10.1063/1.3493204}, year = {2010}, language = {en} }