TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Hermann, Sonja A1 - Dezhdar, Tara A1 - Harder, Nils-Peter A1 - Brendel, Rolf A1 - Seibt, Michael A1 - Stroj, Sandra T1 - Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers JF - Journal of Applied Physics KW - Diodes KW - High-speed optical techniques KW - Laser ablation KW - Passivation KW - Scanning electron microscopy Y1 - 2010 SN - 0021-8979 SS - 0021-8979 U6 - https://doi.org/10.1063/1.3493204 DO - https://doi.org/10.1063/1.3493204 VL - 108. Jg. IS - H. 11 SP - 8 S1 - 8 ER -