TY - CHAP U1 - Konferenzveröffentlichung A1 - Lalinsky, Tibor A1 - Hudek, Peter A1 - Vanko, Gabriel A1 - Choleva, Pavlina A1 - Vallo, Martin A1 - Drzik, Milan A1 - Dzuba, Jaroslav A1 - Kutis, Vladimir A1 - Matay, Ladislav A1 - Kostic, Ivan T1 - Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices. Poster T2 - MNE 2011 (Micro- and Nano Engineering Conference), Berlin, Germany, September 19 – 23, 2011 Y1 - 2011 ER -