TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Partel, Stefan
A1  - Mayer, Markus
A1  - Hudek, Peter
A1  - Dincer, Can
A1  - Kieninger, Jochen
A1  - Urban, Gerhard A.
A1  - Motzek, Kristian
A1  - Matay, Ladislav
T1  - Fabrication process development for a high sensitive electrochemical IDA sensor
JF  - Microelectronic Engineering
Y1  - 2011
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/j.mee.2012.03.028
DO  - https://doi.org/10.1016/j.mee.2012.03.028
VL  - o.Jg.
IS  - Bd. 97
SP  - 235
EP  - 240
ER  -