TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Piredda, Giovanni A1 - Stroj, Sandra A1 - Ziss, Dorian A1 - Stangl, Julian A1 - Trotta, Rinaldo A1 - Martin-Sanchez, Javier A1 - Rastelli, Armando T1 - Micro-machining of PMN-PT crystals with ultrashort laser pulses JF - Applied Physics A N2 - Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators. Y1 - 2019 U6 - https://doi.org/10.1007/s00339-019-2460-9 DO - https://doi.org/10.1007/s00339-019-2460-9 VL - 125. Jg. IS - H. 3 SP - 11 S1 - 11 ER -