TY - CHAP U1 - Konferenzveröffentlichung A1 - Ho, Stephen A1 - Domke, Matthias A1 - Roper, David A1 - Huber, Heinz A1 - Herman, Peter R. T1 - Femtosecond laser quantized structuring in thin SiOx film. Paper STh3Q.4 T2 - Conference on Lasers and Electro-Optics (2016). CLEO: Science and Innovations. San Jose, California United States. 5–10 June 2016 KW - Femtosecond phenomena KW - Laser materials processing KW - nanostructures KW - Subwavelength structures Y1 - 2016 SP - 2 S1 - 2 PB - Optical Society of America ER -