TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Zoppel, Sandra
A1  - Farsari, Maria
A1  - Merz, Robert
A1  - Zehetner, Johann
A1  - Stangl, Günther
A1  - Reider, Georg A.
A1  - Fotakis, Costas
T1  - Laser micro machining of 3C-SiC single crystals
JF  - Microelectronic Engineering
KW  - Distributed feedback lasers
KW  - Dye lasers
KW  - Excimer lasers
KW  - Laser ablation
KW  - Laser beam machining
Y1  - 2006
U6  - https://doi.org/10.1016/j.mee.2006.01.064
DO  - https://doi.org/10.1016/j.mee.2006.01.064
VL  - 83. Jg.
IS  - H. 4-9: Micro- and Nano-Engineering MNE 2005. Vienna, Austria. 19-22 September 2005
SP  - 1400
EP  - 1402
ER  -