@inproceedings{DomkePireddaZehetneretal.2015,
  author    = {Matthias Domke and Giovanni Piredda and Johann Zehetner and Sandra Stroj},
  title     = {Minimizing the surface roughness for silicon ablation with ultrashort laser pulses},
  series = {Proceedings of LAMP2015 - the 7th International Congress on Laser Advanced Materials Processing},
  year      = {2015},
  language  = {en}
}