@inproceedings{DomkeStrojMatylitsky2020,
  author    = {Matthias Domke and Sandra Stroj and Victor Matylitsky},
  title     = {Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses},
  series = {Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. 4–6 February 2019. San Francisco, California, United States},
  editor    = {Tetsuya Makimura and Gediminas Raciukaitis and Carlos Molpeceres},
  publisher = {SPIE},
  address   = {Bellingham, Washington},
  doi       = {10.1117/12.2514441},
  year      = {2020},
  language  = {en}
}