@inproceedings{LalinskyHudekVankoetal.2011, author = {Tibor Lalinsky and Peter Hudek and Gabriel Vanko and Pavlina Choleva and Martin Vallo and Milan Drzik and Jaroslav Dzuba and Vladimir Kutis and Ladislav Matay and Ivan Kostic}, title = {Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices. Poster}, series = {MNE 2011 (Micro- and Nano Engineering Conference), Berlin, Germany, September 19 – 23, 2011}, year = {2011}, language = {en} }