@article{VankoHudekZehetneretal.2013,
  author    = {Gabriel Vanko and Peter Hudek and Johann Zehetner and Jaroslav Dzuba and Pavlina Choleva and Vladimir Kutis and Martin Vallo and Ivan Ryger and Tibor Lalinsky},
  title     = {Bulk micromachining of SiC substrate for MEMS sensor applications},
  series   = {Microelectronic Engineering},
  volume    = {o. Jg.},
  number    = {Bd. 110},
  issn      = {0167-9317},
  doi       = {10.1016/j.mee.2013.01.046},
  pages     = {260 -- 264},
  year      = {2013},
  language  = {en}
}