TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Zehetner, Johann A1 - Kraus, Stanislav A1 - Lucki, Michal A1 - Vanko, Gabriel A1 - Dzuba, Jaroslav A1 - Lalinsky, Tibor T1 - Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors JF - Microsystem Technologies Y1 - 2016 SN - 0946-7076 SS - 0946-7076 SN - 1432-1858 SS - 1432-1858 U6 - https://doi.org/10.1007/s00542-016-2887-2 DO - https://doi.org/10.1007/s00542-016-2887-2 VL - 22. Jg. IS - H. 7 SP - 1883 EP - 1892 ER -