TY - CHAP U1 - Konferenzveröffentlichung A1 - Zehetner, Johann A1 - Vanko, Gabriel A1 - Dzuba, Jaroslav A1 - Lalinsky, Tibor A1 - Lucki, Michal A1 - Kraus, Stanislav ED - Vajda, Jan ED - Jamnicky, Igor T1 - Micro structuring of bulk SiC substrates by femtosecond laser ablation T2 - Proceedings of the 22nd International Conference on Applied Physics of Condensed Matter (APCOM 2016). June 22 - 24, 2016. Hotel Patria, Strbske Pleso, Slovak Republic Y1 - 2016 SP - 302 EP - 306 PB - Slovenska Technicka Univerzita CY - Bratislava ER -