@article{ZehetnerVankoDzubaetal.2017, author = {Johann Zehetner and Gabriel Vanko and Jaroslav Dzuba and Tibor Lalinsky}, title = {Femtosecond laser processing of membranes for sensor devices on different bulk materials}, series = {Advances in Electrical and Electronic Engineering}, volume = {15. Jg.}, number = {H. 3}, doi = {10.15598/aeee.v15i3.2033}, pages = {561 -- 568}, year = {2017}, language = {en} }