TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Vanko, Gabriel
A1  - Hudek, Peter
A1  - Zehetner, Johann
A1  - Dzuba, Jaroslav
A1  - Choleva, Pavlina
A1  - Vallo, Martin
A1  - Ryger, Ivan
A1  - Lalinsky, Tibor
ED  - Schmid, Ulrich
ED  - Sanchez de Rojas Aldavero, Jose Luis
ED  - Leester-Schaedel, Monika
T1  - MEMS pressure sensor fabricated by advanced bulk micromachining techniques
T2  - Smart sensors, actuators, and MEMS VI. 24-26 April 2013. Grenoble, France
Y1  - 2013
SP  - 87632
S1  - 87632
PB  - SPIE
CY  - Bellingham, Wash.
ER  -