@inproceedings{VankoHudekZehetneretal.2013, author = {Gabriel Vanko and Peter Hudek and Johann Zehetner and Jaroslav Dzuba and Pavlina Choleva and Martin Vallo and Ivan Ryger and Tibor Lalinsky}, title = {MEMS pressure sensor fabricated by advanced bulk micromachining techniques}, series = {Smart sensors, actuators, and MEMS VI. 24-26 April 2013. Grenoble, France}, editor = {Ulrich Schmid and Jose Luis Sanchez de Rojas Aldavero and Monika Leester-Schaedel}, publisher = {SPIE}, address = {Bellingham, Wash.}, year = {2013}, language = {en} }