TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Zehetner, Johann A1 - Vanko, Gabriel A1 - Dzuba, Jaroslav A1 - Lalinsky, Tibor T1 - Femtosecond laser processing of membranes for sensor devices on different bulk materials JF - Advances in Electrical and Electronic Engineering Y1 - 2017 U6 - https://doi.org/10.15598/aeee.v15i3.2033 DO - https://doi.org/10.15598/aeee.v15i3.2033 VL - 15. Jg. IS - H. 3 SP - 561 EP - 568 ER -