TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Vanko, Gabriel A1 - Hudek, Peter A1 - Zehetner, Johann A1 - Dzuba, Jaroslav A1 - Choleva, Pavlina A1 - Kutis, Vladimir A1 - Vallo, Martin A1 - Ryger, Ivan A1 - Lalinsky, Tibor T1 - Bulk micromachining of SiC substrate for MEMS sensor applications JF - Microelectronic Engineering KW - Laser ablation KW - AlGaN/GaN HEMT KW - Bulk micromachining KW - SiC MEMS Y1 - 2013 SN - 0167-9317 SS - 0167-9317 U6 - https://doi.org/10.1016/j.mee.2013.01.046 DO - https://doi.org/10.1016/j.mee.2013.01.046 VL - o. Jg. IS - Bd. 110 SP - 260 EP - 264 ER -