@inproceedings{ZehetnerVankoDzubaetal.2016,
  author    = {Johann Zehetner and Gabriel Vanko and Jaroslav Dzuba and Tibor Lalinsky and Michal Lucki and Stanislav Kraus},
  title     = {Micro structuring of bulk SiC substrates by femtosecond laser ablation},
  series = {Proceedings of the 22nd International Conference on Applied Physics of Condensed Matter (APCOM 2016). June 22 - 24, 2016. Hotel Patria, Strbske Pleso, Slovak Republic},
  editor    = {Jan Vajda and Igor Jamnicky},
  publisher = {Slovenska Technicka Univerzita},
  address   = {Bratislava},
  pages     = {302 -- 306},
  year      = {2016},
  language  = {en}
}