TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Domke, Matthias
A1  - Piredda, Giovanni
A1  - Zehetner, Johann
A1  - Stroj, Sandra
T1  - Minimizing the surface roughness for silicon ablation with ultrashort laser pulses
JF  - JLMN - Journal of Laser Micro/Nanoengineering
Y1  - 2016
U6  - https://doi.org/10.2961/jlmn.2016.01.0019
DO  - https://doi.org/10.2961/jlmn.2016.01.0019
VL  - 11. Jg.
IS  - H. 1
SP  - 100
EP  - 103
ER  -