TY - CHAP U1 - Konferenzveröffentlichung A1 - Vanko, Gabriel A1 - Zehetner, Johann A1 - Choleva, Pavlina A1 - Lalinský, Tibor A1 - Hudek, Peter ED - Haščík, Štefan ED - Osvald, Jozef T1 - Laser ablation: a supporting technique to micromachining of SiC T2 - ASDAM 2012. Conference proceedings. The ninth international conference on advanced semiconductor devices and microsystems. Smolenice (Slovakia). November 11-15, 2012 Y1 - 2012 U6 - https://doi.org/10.1109/ASDAM.2012.6418518 DO - https://doi.org/10.1109/ASDAM.2012.6418518 SP - 259 EP - 262 PB - IEE CY - Piscataway, NJ ER -