@inproceedings{VankoZehetnerCholevaetal.2012, author = {Gabriel Vanko and Johann Zehetner and Pavlina Choleva and Tibor Lalinsk{\´y} and Peter Hudek}, title = {Laser ablation: a supporting technique to micromachining of SiC}, series = {ASDAM 2012. Conference proceedings. The ninth international conference on advanced semiconductor devices and microsystems. Smolenice (Slovakia). November 11-15, 2012}, editor = {Štefan Hašč{\´i}k and Jozef Osvald}, publisher = {IEE}, address = {Piscataway, NJ}, doi = {10.1109/ASDAM.2012.6418518}, pages = {259 -- 262}, year = {2012}, language = {en} }