TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Domke, Matthias
A1  - Piredda, Giovanni
A1  - Zehetner, Johann
A1  - Stroj, Sandra
T1  - Minimizing the surface roughness for silicon ablation with ultrashort laser pulses
T2  - Proceedings of LAMP2015 - the 7th International Congress on Laser Advanced Materials Processing
Y1  - 2015
ER  -