@article{ZehetnerKrausLuckietal.2016, author = {Johann Zehetner and Stanislav Kraus and Michal Lucki and Gabriel Vanko and Jaroslav Dzuba and Tibor Lalinsky}, title = {Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors}, series = {Microsystem Technologies}, volume = {22. Jg.}, number = {H. 7}, issn = {0946-7076}, doi = {10.1007/s00542-016-2887-2}, pages = {1883 -- 1892}, year = {2016}, language = {en} }