@article{DomkePireddaZehetneretal.2016,
  author    = {Matthias Domke and Giovanni Piredda and Johann Zehetner and Sandra Stroj},
  title     = {Minimizing the surface roughness for silicon ablation with ultrashort laser pulses},
  series   = {JLMN - Journal of Laser Micro/Nanoengineering},
  volume    = {11. Jg.},
  number    = {H. 1},
  doi       = {10.2961/jlmn.2016.01.0019},
  pages     = {100 -- 103},
  year      = {2016},
  language  = {en}
}