@inproceedings{RappHeinrichDomkeetal.2014,
  author    = {Stephan Rapp and Gerrit Heinrich and Matthias Domke and Heinz P. Huber},
  title     = {The combination of direct and confined laser ablation mechanisms for the selective structuring of thin silicon nitride layers},
  series = {8th International Conference on Laser Assisted Net Shape Engineering LANE 2014},
  volume    = {o.Jg.},
  doi       = {10.1016/j.phpro.2014.08.011},
  pages     = {998 -- 1006},
  year      = {2014},
  language  = {en}
}