@article{FarsariFilippidisZoppeletal.2007, author = {Maria Farsari and George Filippidis and Sandra Zoppel and Georg A. Reider and Costas Fotakis}, title = {Micromachining of silicon carbide using femtosecond lasers}, series = {Journal of Physics: Conference Series}, volume = {o.Jg.}, number = {Bd. 59: Eighth International Conference on Laser Ablation. Banff, Canada. 11–16 September 2005}, doi = {10.1088/1742-6596/59/1/018}, pages = {84 -- 87}, year = {2007}, abstract = {We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude.}, language = {en} }