@article{DomkeEglePireddaetal.2016,
  author    = {Matthias Domke and Bernadette Egle and Giovanni Piredda and Sandra Stroj and Gernot Fasching and Marius Bodea and Elisabeth Schwarz},
  title     = {Ultrashort pulse laser dicing of thin Si wafers. The influence of laser-induced periodic surface structures on the backside breaking strength},
  series   = {Journal of Micromechanics and Microengineering},
  volume    = {26. Jg.},
  number    = {H. 11},
  issn      = {0960-1317},
  doi       = {10.1088/0960-1317/26/11/115004},
  year      = {2016},
  language  = {en}
}