TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Domke, Matthias
A1  - Egle, Bernadette
A1  - Piredda, Giovanni
A1  - Stroj, Sandra
A1  - Fasching, Gernot
A1  - Bodea, Marius
A1  - Schwarz, Elisabeth
T1  - Ultrashort pulse laser dicing of thin Si wafers. The influence of laser-induced periodic surface structures on the backside breaking strength
JF  - Journal of Micromechanics and Microengineering
Y1  - 2016
SN  - 0960-1317
SS  - 0960-1317
U6  - https://doi.org/10.1088/0960-1317/26/11/115004
DO  - https://doi.org/10.1088/0960-1317/26/11/115004
VL  - 26. Jg.
IS  - H. 11
SP  - 7
S1  - 7
ER  -