@inproceedings{ZehetnerSeyringerSerecunovaetal.2021,
  author    = {Johann Zehetner and Dana Seyringer and Stanislava Serecunova and Peter Gaso and Dusan Pudis and Ivan Hotovy and Miroslav Mikolasek and Heinz Seyringer},
  title     = {Fabrication of passive and active photonic coupling structures using fs-laser ablation},
  series = {Proceedings of ADEPT 2021. 9th International Conference on Advances in Electronic and Photonic Technologies. Podbanske, High Tatras, Slovakia. September 20-23, 2021},
  editor    = {Dano Jandura and Petra Maniakova and Ivana Lettrichova and Jaroslav Kovac, Jr.},
  publisher = {University of Zilina in EDIS-Publishing Centre of UZ},
  address   = {Zilina},
  isbn      = {978-80-554-1806-3},
  pages     = {255 -- 258},
  year      = {2021},
  abstract  = {Femtosecond laser ablation on Si generates 2D ripple structures, known as laser induced periodic surface structures (LIPSS) and pinholes. We fabricated membranes with 20 to 50 μm thickness perforated by an array of tapered pinholes up to 5 μm in diameter and 10 to 20 μm spacing. Within several micrometer the pinholes transform into hollow photonic waveguides with constant diameter from 1μm to 2μm. Such structures offer a 3D photonic coupling device for polymer Y-branch- and MMI-splitter. We measured a considerable change of electrical resistivity for 500 ppm H2 in air using Si/SiO2/TiO2 substrates with 2D LIPSS. We propose to investigate 3D waveguide arrays also for photonic-chemical sensors.},
  language  = {en}
}